Description
This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.
Author: Seán Thomas Barry
Publisher: de Gruyter
Published: 11/08/2021
Pages: 113
Binding Type: Paperback
Weight: 0.43lbs
Size: 9.61h x 6.69w x 0.24d
ISBN13: 9783110712513
ISBN10: 3110712512
BISAC Categories:
- Technology & Engineering | Materials Science | Metals & Alloys
- Science | Chemistry | Inorganic
- Technology & Engineering | Electronics | Microelectronics