Glow Discharge Processes: Sputtering and Plasma Etching


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Description


Author: Brian Chapman
Publisher: Wiley-Interscience
Published: 09/25/1980
Pages: 432
Binding Type: Hardcover
Weight: 1.64lbs
Size: 9.70h x 6.18w x 1.21d
ISBN13: 9780471078289
ISBN10: 047107828X
BISAC Categories:
- Science | Physics | Electromagnetism
- Science | Physics | General
- Technology & Engineering | Electrical

About the Author

Brian Chapman is the author of Glow Discharge Processes: Sputtering and Plasma Etching, published by Wiley.