Magnetrons, reactive gases and sputtering

This handbook covers the fundamental aspects of reactive magnetron sputter deposition. This physical vapor deposition technique is used to grow compound thin films. The books starts with an explanation of the four title words. Using a simple model several aspects of the deposition technique are introduced. In the following chapters the book introduces a more complete mode to address some specific features of reactive sputter deposition. Some important points related to thin film growth are introduced and illustrated. The reader is challenged by some questions, and can rely on a large database of material/reactive gas combinations.

Author: Diederik Depla
Publisher: Lulu.com
Published: 09/15/2013
Pages: 572
Binding Type: Hardcover
Weight: 2.05lbs
Size: 9.00h x 6.00w x 1.25d
ISBN13: 9781304347817
ISBN10: 1304347818
BISAC Categories:
- Science | Physics | Condensed Matter

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